@misc{indiciae4de9f5582fb1,
  title = {Titanium Nitride Film on Sapphire Substrate with Low Dielectric Loss for Superconducting Qubits},
  author = {Hao Deng and Zhijun Song and Ran Gao and Tian Xia and Feng Bao and Xun Jiang and Hsiang-Sheng Ku and Zhisheng Li and Xizheng Ma and Jin Qin and Hantao Sun and Chengchun Tang and Tenghui Wang and Feng Wu and Wenlong Yu and Gengyan Zhang and Xiaohang Zhang and Jingwei Zhou and Xing Zhu and Yaoyun Shi and Hui-Hai Zhao and Chunqing Deng},
  year = {2022},
  url = {https://arxiv.org/abs/2205.03528},
  note = {Source identifier: 2205.03528}
}