@misc{indiciae0135e7a7fb6c,
  title = {Microsecond non-melt UV laser annealing for future 3D-stacked CMOS},
  author = {Toshiyuki Tabata and Fabien Rozé and Louis Thuries and Sebastien Halty and Pierre-Edouard Raynal and Karim Huet and Fulvio Mazzamuto and Abhijeet Joshi and Bulent M. Basol and Pablo Acosta Alba and Sébastien Kerdilès},
  year = {2022},
  doi = {10.35848/1882-0786/ac6e2a},
  url = {https://arxiv.org/abs/2205.04669},
  note = {Source identifier: 2205.04669}
}