@misc{indiciaeb39ab20e0c46,
  title = {Fully automated spectroscopic ellipsometry analyses of crystalline-phase semiconductors based on a new algorithm},
  author = {Sara Maeda and Kohei Oiwake and Yukinori Nishigaki and Tetsuhiko Miyadera and Masayuki Chikamatsu and Takayuki Nagai and Takuma Aizawa and Kota Hanzawa and Hidenori Hiramatsu and Hideo Hosono and Hiroyuki Fujiwara},
  year = {2022},
  url = {https://arxiv.org/abs/2205.05833},
  note = {Source identifier: 2205.05833}
}