@misc{indiciaee18e4d29038e,
  title = {Machine learning and atomic layer deposition: predicting saturation times from reactor growth profiles using artificial neural networks},
  author = {Angel Yanguas-Gil and Jeffrey W. Elam},
  year = {2022},
  doi = {10.1116/6.0001973},
  url = {https://arxiv.org/abs/2205.08378},
  note = {Source identifier: 2205.08378}
}