TY  - RPRT
TI  - Machine learning and atomic layer deposition: predicting saturation times from reactor growth profiles using artificial neural networks
AU  - Angel Yanguas-Gil
AU  - Jeffrey W. Elam
PY  - 2022
DO  - 10.1116/6.0001973
UR  - https://arxiv.org/abs/2205.08378
ID  - 2205.08378
ER  -