TY - RPRT TI - Silicon nitride waveguides with intrinsic single-photon emitters for integrated quantum photonics AU - Alexander Senichev AU - Samuel Peana AU - Zachariah O. Martin AU - Omer Yesilyurt AU - Demid Sychev AU - Alexei S. Lagutchev AU - Alexandra Boltasseva AU - Vladimir M. Shalaev PY - 2022 DO - 10.1021/acsphotonics.2c00750 UR - https://arxiv.org/abs/2205.08481 ID - 2205.08481 ER -