TY - RPRT TI - Towards efficient structure prediction and pre-compensation in multi-photon lithography AU - Nicolas Lang AU - Sven Enns AU - Julian Hering AU - Georg von Freymann PY - 2022 DO - 10.1364/oe.462775 UR - https://arxiv.org/abs/2205.14891 ID - 2205.14891 ER -