@misc{indiciae00e6703684b5,
  title = {Machine Learning Methods for Health-Index Prediction in Coating Chambers},
  author = {Clemens Heistracher and Anahid Jalali and Jürgen Schneeweiss and Klaudia Kovacs and Catherine Laflamme and Bernhard Haslhofer},
  year = {2022},
  url = {https://arxiv.org/abs/2205.15145},
  note = {Source identifier: 2205.15145}
}