TY  - RPRT
TI  - Machine Learning Methods for Health-Index Prediction in Coating Chambers
AU  - Clemens Heistracher
AU  - Anahid Jalali
AU  - Jürgen Schneeweiss
AU  - Klaudia Kovacs
AU  - Catherine Laflamme
AU  - Bernhard Haslhofer
PY  - 2022
UR  - https://arxiv.org/abs/2205.15145
ID  - 2205.15145
ER  -