@misc{indiciaebc607fbf44c9, title = {Mechanical dissipation by substrate-mode coupling in SiN resonators}, author = {Matthijs H. J. de Jong and Malte A. ten Wolde and Andrea Cupertino and Simon Gröblacher and Peter G. Steeneken and Richard A. Norte}, year = {2022}, doi = {10.1063/5.0092894}, url = {https://arxiv.org/abs/2206.00990}, note = {Source identifier: 2206.00990} }