@misc{indiciaecd2f14b2858b,
  title = {Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at Nanometer Scale using Focused Electron Beam Induced Deposition},
  author = {Po-Shi Yuan and Nigel Mason and Maria Pintea and Csarnovics István and Tamás Fodor},
  year = {2022},
  url = {https://arxiv.org/abs/2206.01422},
  note = {Source identifier: 2206.01422}
}