@misc{indiciae0f216695d962, title = {Silicon oxynitride platform for linear and nonlinear photonics at NIR wavelengths}, author = {Gioele Piccoli and Matteo Sanna and Massimo Borghi and Lorenzo Pavesi and Mher Ghulinyan}, year = {2022}, doi = {10.1364/ome.463940}, url = {https://arxiv.org/abs/2206.04388}, note = {Source identifier: 2206.04388} }