@misc{indiciae16173565af42,
  title = {On-chip frequency tuning of fast resonant MEMS scanner},
  author = {Paul Janin and Deepak Uttamchandani and Ralf Bauer},
  year = {2022},
  url = {https://arxiv.org/abs/2206.06785},
  note = {Source identifier: 2206.06785}
}