TY  - RPRT
TI  - On-chip frequency tuning of fast resonant MEMS scanner
AU  - Paul Janin
AU  - Deepak Uttamchandani
AU  - Ralf Bauer
PY  - 2022
UR  - https://arxiv.org/abs/2206.06785
ID  - 2206.06785
ER  -