@misc{indiciaefeddeec511df, title = {Nanoscale 3D tomography by in-flight fluorescence spectroscopy of atoms sputtered by a focused ion beam}, author = {Garrett Budnik and John Scott and Chengge Jiao and Mostafa Maazouz and Galen Gledhill and Lan Fu and Hark Hoe Tan and Milos Toth}, year = {2022}, doi = {10.1021/acs.nanolett.2c03101}, url = {https://arxiv.org/abs/2206.10729}, note = {Source identifier: 2206.10729} }