TY  - RPRT
TI  - Nanoscale 3D tomography by in-flight fluorescence spectroscopy of atoms sputtered by a focused ion beam
AU  - Garrett Budnik
AU  - John Scott
AU  - Chengge Jiao
AU  - Mostafa Maazouz
AU  - Galen Gledhill
AU  - Lan Fu
AU  - Hark Hoe Tan
AU  - Milos Toth
PY  - 2022
DO  - 10.1021/acs.nanolett.2c03101
UR  - https://arxiv.org/abs/2206.10729
ID  - 2206.10729
ER  -