@misc{indiciaeadac0c1d743b,
  title = {Tailoring of rhenium oxidation state in ReOx thin films during reactive HiPIMS deposition process and following annealing},
  author = {M. Zubkins and A. Sarakovskis and E. Strods and L. Bikse and B. Polyakov and A. Kuzmin and V. Vibornijs and J. Purans},
  year = {2022},
  doi = {10.1016/j.matchemphys.2022.126399},
  url = {https://arxiv.org/abs/2206.14665},
  note = {Source identifier: 2206.14665}
}