TY  - RPRT
TI  - Tailoring of rhenium oxidation state in ReOx thin films during reactive HiPIMS deposition process and following annealing
AU  - M. Zubkins
AU  - A. Sarakovskis
AU  - E. Strods
AU  - L. Bikse
AU  - B. Polyakov
AU  - A. Kuzmin
AU  - V. Vibornijs
AU  - J. Purans
PY  - 2022
DO  - 10.1016/j.matchemphys.2022.126399
UR  - https://arxiv.org/abs/2206.14665
ID  - 2206.14665
ER  -