@misc{indiciaee7778a207455, title = {Surface Passivation of III-V GaAs Nanopillars by Low Frequency Plasma Deposition of Silicon Nitride for Active Nanophotonic Devices}, author = {Bejoys Jacob and Filipe Camarneiro and Jérôme Borme and Oleksandr Bondarchuk and Jana B. Nieder and Bruno Romeira}, year = {2022}, doi = {10.1021/acsaelm.2c00195}, url = {https://arxiv.org/abs/2206.15358}, note = {Source identifier: 2206.15358} }