TY  - RPRT
TI  - Surface Passivation of III-V GaAs Nanopillars by Low Frequency Plasma Deposition of Silicon Nitride for Active Nanophotonic Devices
AU  - Bejoys Jacob
AU  - Filipe Camarneiro
AU  - Jérôme Borme
AU  - Oleksandr Bondarchuk
AU  - Jana B. Nieder
AU  - Bruno Romeira
PY  - 2022
DO  - 10.1021/acsaelm.2c00195
UR  - https://arxiv.org/abs/2206.15358
ID  - 2206.15358
ER  -