@misc{indiciae30456885ba75,
  title = {Ultrathin AlScN for low-voltage driven ferroelectric-based devices},
  author = {Georg Schönweger and Md Redwanul Islam and Niklas Wolff and Adrian Petraru and Lorenz Kienle and Hermann Kohlstedt and Simon Fichtner},
  year = {2022},
  doi = {10.1002/pssr.202200312},
  url = {https://arxiv.org/abs/2207.01858},
  note = {Source identifier: 2207.01858}
}