TY  - RPRT
TI  - Large Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Training
AU  - Haoyu Yang
AU  - Zongyi Li
AU  - Kumara Sastry
AU  - Saumyadip Mukhopadhyay
AU  - Anima Anandkumar
AU  - Brucek Khailany
AU  - Vivek Singh
AU  - Haoxing Ren
PY  - 2022
UR  - https://arxiv.org/abs/2207.04056
ID  - 2207.04056
ER  -