@misc{indiciaecc91855a99df,
  title = {Microcantilever-integrated photonic circuits for broadband laser beam scanning},
  author = {Saeed Sharif Azadeh and Jason C. C. Mak and Hong Chen and Xianshu Luo and Fu-Der Chen and Hongyao Chua and Frank Weiss and Christopher Alexiev and Andrei Stalmashonak and Youngho Jung and John N. Straguzzi and Guo-Qiang Lo and Wesley D. Sacher and Joyce K. S. Poon},
  year = {2022},
  doi = {10.1038/s41467-023-38260-8},
  url = {https://arxiv.org/abs/2207.12374},
  note = {Source identifier: 2207.12374}
}