@misc{indiciae7a2b7c56ad1b, title = {Micro-machined deep silicon atomic vapor cells}, author = {S. Dyer and P. F. Griffin and A. S. Arnold and F. Mirando and D. P. Burt and E. Riis and J. P. McGilligan}, year = {2022}, doi = {10.1063/5.0114762}, url = {https://arxiv.org/abs/2207.12904}, note = {Source identifier: 2207.12904} }