@misc{indiciaecc1672d54475,
  title = {Deposition of the stoichiometric coatings by reactive magnetron sputtering},
  author = {A. Sagalovych and S. Dudnik and V. Sagalovych},
  year = {2022},
  url = {https://arxiv.org/abs/2207.13323},
  note = {Source identifier: 2207.13323}
}