TY  - RPRT
TI  - Deposition of the stoichiometric coatings by reactive magnetron sputtering
AU  - A. Sagalovych
AU  - S. Dudnik
AU  - V. Sagalovych
PY  - 2022
UR  - https://arxiv.org/abs/2207.13323
ID  - 2207.13323
ER  -