@misc{indiciaef159c6ad6728,
  title = {Mapping single-shot angle-resolved spectroscopic micro-ellipsometry with sub-5 microns lateral resolution},
  author = {Ralfy Kenaz and Ronen Rapaport},
  year = {2022},
  doi = {10.1063/5.0123249},
  url = {https://arxiv.org/abs/2207.14161},
  note = {Source identifier: 2207.14161}
}