TY  - RPRT
TI  - Mapping single-shot angle-resolved spectroscopic micro-ellipsometry with sub-5 microns lateral resolution
AU  - Ralfy Kenaz
AU  - Ronen Rapaport
PY  - 2022
DO  - 10.1063/5.0123249
UR  - https://arxiv.org/abs/2207.14161
ID  - 2207.14161
ER  -