@misc{indiciaeae4ea4096fa1, title = {Aluminum nitride waveguide beam splitters for integrated quantum photonic circuits}, author = {Hyeong-Soon Jang and Donghwa Lee and Hyungjun Heo and Yong-Su Kim and Hyang-Tag Lim and Seung-Woo Jeon and Sung Moon and Sangin Kim and Sang-Wook Han and Hojoong Jung}, year = {2022}, url = {https://arxiv.org/abs/2208.01377}, note = {Source identifier: 2208.01377} }