@misc{indiciaed853bf42656a,
  title = {Thermoelastic Damping in MEMS Gyroscopes at High Frequencies},
  author = {Daniel Schiwietz and Eva M. Weig and Peter Degenfeld-Schonburg},
  year = {2024},
  doi = {10.1038/s41378-022-00480-1},
  url = {https://arxiv.org/abs/2208.02591},
  note = {Source identifier: 2208.02591}
}