TY  - RPRT
TI  - Thermoelastic Damping in MEMS Gyroscopes at High Frequencies
AU  - Daniel Schiwietz
AU  - Eva M. Weig
AU  - Peter Degenfeld-Schonburg
PY  - 2024
DO  - 10.1038/s41378-022-00480-1
UR  - https://arxiv.org/abs/2208.02591
ID  - 2208.02591
ER  -