@misc{indiciaec63feff49f0e,
  title = {STEM analysis of deformation and B distribution in nanosecond laser ultra-doped Si\$\_\{1-x\}\$ B\$\_x\$},
  author = {G. Hallais and G. Patriarche and L. Desvignes and D. Débarre and F. Chiodi},
  year = {2022},
  doi = {10.1088/1361-6641/acb0f0},
  url = {https://arxiv.org/abs/2208.05053},
  note = {Source identifier: 2208.05053}
}