@misc{indiciae25147f1ff19a,
  title = {Different textured PZT thin films grown on a single SiO2/Ti/Pt stack for piezo MEMS applications},
  author = {Antony Jeyaseelan A and Vijayendra Shastri and Kaustav Roy and Rudra Pratap},
  year = {2022},
  url = {https://arxiv.org/abs/2208.06255},
  note = {Source identifier: 2208.06255}
}