TY  - RPRT
TI  - Different textured PZT thin films grown on a single SiO2/Ti/Pt stack for piezo MEMS applications
AU  - Antony Jeyaseelan A
AU  - Vijayendra Shastri
AU  - Kaustav Roy
AU  - Rudra Pratap
PY  - 2022
UR  - https://arxiv.org/abs/2208.06255
ID  - 2208.06255
ER  -