@misc{indiciae2477f92b46e7, title = {Non-destructive X-ray imaging of patterned delta-layer devices in silicon}, author = {Nicolò D'Anna and Dario Ferreira Sanchez and Guy Matmon and Jamie Bragg and Procopios C. Constantinou and Taylor J. Z. Stock and Sarah Fearn and Steven R. Schofield and Neil J. Curson and Marek Bartkowiak and Y. Soh and Daniel Grolimund and Simon Gerber and Gabriel Aeppli}, year = {2023}, doi = {10.1002/aelm.202201212}, url = {https://arxiv.org/abs/2208.09379}, note = {Source identifier: 2208.09379} }