@misc{indiciaeec867f883874, title = {Photonic integrated circuit with multiple waveguide layers for broadband high-efficient on-chip 3-D optical phased arrays in light detection and ranging applications}, author = {Dachuan Wu and Bowen Yu and Venus Kakdarvishi and Yasha Yi}, year = {2022}, url = {https://arxiv.org/abs/2208.09783}, note = {Source identifier: 2208.09783} }