@misc{indiciaea3e119892c39, title = {Charge-optimized many-body interaction potential for AlN revisited to explore plasma-surface interactions}, author = {Tobias Gergs and Thomas Mussenbrock and Jan Trieschmann}, year = {2022}, url = {https://arxiv.org/abs/2208.11605}, note = {Source identifier: 2208.11605} }