TY  - RPRT
TI  - Charge-optimized many-body interaction potential for AlN revisited to explore plasma-surface interactions
AU  - Tobias Gergs
AU  - Thomas Mussenbrock
AU  - Jan Trieschmann
PY  - 2022
UR  - https://arxiv.org/abs/2208.11605
ID  - 2208.11605
ER  -