TY - RPRT TI - Atomistic modeling of thermal effects in focused electron beam induced deposition of Me$_2$Au(tfac) AU - Alexey Prosvetov AU - Alexey V. Verkhovtsev AU - Gennady Sushko AU - Andrey V. Solov'yov PY - 2022 DO - 10.1140/epjd/s10053-023-00598-5 UR - https://arxiv.org/abs/2208.12134 ID - 2208.12134 ER -