@misc{indiciaec7f564b14c3c,
  title = {Demystifying the measurement of periodic structures},
  author = {David Nečas and Andrew Yacoot and Petr Klapetek},
  year = {2022},
  doi = {10.1088/1361-6501/acbab3},
  url = {https://arxiv.org/abs/2208.12151},
  note = {Source identifier: 2208.12151}
}