TY  - RPRT
TI  - Demystifying the measurement of periodic structures
AU  - David Nečas
AU  - Andrew Yacoot
AU  - Petr Klapetek
PY  - 2022
DO  - 10.1088/1361-6501/acbab3
UR  - https://arxiv.org/abs/2208.12151
ID  - 2208.12151
ER  -