@misc{indiciaeb7fbcc3d71a1, title = {Optimizing nucleation layers for the integration of ferroelectric HZO on CVD-grown graphene}, author = {Suzanne Lancaster and Iciar Arnay and Ruben Guerrero and Adrían Gudín and Thomas Mikolajick and Paolo Perna and Stefan Slesazeck}, year = {2022}, doi = {10.1109/isaf51494.2022.9870121}, url = {https://arxiv.org/abs/2208.14061}, note = {Source identifier: 2208.14061} }