@misc{indiciaef9884ccbfd11,
  title = {Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices},
  author = {Toshiyuki Tabata and Fabien Rozé and Louis Thuries and Sébastien Halty and Pierre-Edouard Raynal and Imen Karmous and Karim Huet},
  year = {2022},
  doi = {10.3390/electronics11172636},
  url = {https://arxiv.org/abs/2209.05337},
  note = {Source identifier: 2209.05337}
}