@misc{indiciaef58605ba0cf1,
  title = {Maskless Generation of Single Silicon Vacancy Arrays in Silicon Carbide by a Focused He+ Ion Beam},
  author = {Zhen-Xuan He and Qiang Li and Xiao-Lei Wen and Ji-Yang Zhou and Wu-Xi Lin and Zhi-He Hao and Jin-Shi Xu and Chuan-Feng Li and Guang-Can Guo},
  year = {2022},
  doi = {10.1021/acsphotonics.2c01209},
  url = {https://arxiv.org/abs/2209.08505},
  note = {Source identifier: 2209.08505}
}