TY  - RPRT
TI  - Maskless Generation of Single Silicon Vacancy Arrays in Silicon Carbide by a Focused He+ Ion Beam
AU  - Zhen-Xuan He
AU  - Qiang Li
AU  - Xiao-Lei Wen
AU  - Ji-Yang Zhou
AU  - Wu-Xi Lin
AU  - Zhi-He Hao
AU  - Jin-Shi Xu
AU  - Chuan-Feng Li
AU  - Guang-Can Guo
PY  - 2022
DO  - 10.1021/acsphotonics.2c01209
UR  - https://arxiv.org/abs/2209.08505
ID  - 2209.08505
ER  -