@misc{indiciae046a72aebb52,
  title = {Electron-beam lithography of nanostructures at the tips of scanning probe cantilevers},
  author = {Luca Forrer and Aurèle Kamber and Armin Knoll and Martino Poggio and Floris Braakman},
  year = {2022},
  url = {https://arxiv.org/abs/2209.11503},
  note = {Source identifier: 2209.11503}
}