@misc{indiciae3497f2ea2eb8,
  title = {Efficient thermo-optic micro-ring phase shifter made of PECVD silicon-rich amorphous silicon carbide},
  author = {Li-Yang Sunny Chang and Steve Pappert and Paul K. L. Yu},
  year = {2022},
  url = {https://arxiv.org/abs/2209.13033},
  note = {Source identifier: 2209.13033}
}