TY  - RPRT
TI  - Efficient thermo-optic micro-ring phase shifter made of PECVD silicon-rich amorphous silicon carbide
AU  - Li-Yang Sunny Chang
AU  - Steve Pappert
AU  - Paul K. L. Yu
PY  - 2022
UR  - https://arxiv.org/abs/2209.13033
ID  - 2209.13033
ER  -