@misc{indiciaec7d9c6979038, title = {Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride}, author = {Hani Nejadriahi and Prabhav Gaur and Karl Johnson and Steve Pappert and Yeshaiahu Fainman and Paul Yu}, year = {2022}, doi = {10.1364/ol.476819}, url = {https://arxiv.org/abs/2209.13229}, note = {Source identifier: 2209.13229} }