@misc{indiciaeed5a452440f5,
  title = {High aspect ratio arrays of Si nano-pillars using displacement Talbot lithography and gas-MacEtch},
  author = {Z. Shi and K. Jefimovs and M. Stampanoni and L. Romano},
  year = {2022},
  url = {https://arxiv.org/abs/2209.13672},
  note = {Source identifier: 2209.13672}
}